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MEMS in the world!
University & Federal lab
America
- The MEMS Exchange
- a US network of MEMS fabrication facility
- DARPA (MEMS)
- defense agency MEMS research in the US
- DARPA (MOEMS)
- Sandia Lab - About MEMS
- the home of the SummitV process (five layer poly with CMP)
- MEMS - UW-Madison
- Caltech MEMS Laboratory
- U Cornell
- Caltech MEMS Laboratory
- where the Cornell NanoFabrication center is - but almost no more MEMS there [09/01]...
- U of MINNESOTA - MEMS Program
- U of L MicroTechnology Center
- UCLA MEMS home page
- U of L MicroTechnology Center
- the gateway to the MEMS in UCLA - Prof. Wu, Kim, Judy and Ho
- UCB - Berkeley Sensor & Actuator Center
- THE famous BSAC!
- UCB - Kris Pister
- The guy of hinge fame following his smartdust vision.
- UC Santa Barbara - MacDonald
- Prof. N. C. MacDonald's group (formerly at Cornell and also DARPA programme director)
- UC Santa Barbara - Turner
- Prof. K. L. Turner's group
- UC Irvine - Marc Madou
- The guy behind 'Fundamentals of Microfabrication' book pursuing research on BioMEMS.
- Univ. of Colorado
- all the MEMS at UC - including Prof V. Bright
- Univ. of Michigan
- The home of C. Nguyen, R. Wise, K. Najafi
- Carnegie Mellon University
- Georgia Tech MEMS
- MIT - Microsystems Technology Laboratories
- Georgia Tech MEMS
- the home of S. Senturia and most MEMS simulation package
Asia
- Fujita Lab
- at the University of Tokyo, Japan, headed by Prof. H. Fujita and H. Toshiyoshi.
- Konishi Laboratory
- Ritsumeikan University, Osaka, Japan
- Esashi lab
- at the Tohoku University in Sendai, Japan
Europe
- FZK
- in Karlsruhe, Germany
- Microsensor & Actuator Technology
- at TU-Berlin, Germany, headed by Prof. E. Obermeier
- TIMA-CMP Laboratory
- in Grenoble, France
- SAMLAB (Sensors, Actuators and Microsystems Laboratory)
- at the IMT in Neuchatel, CH, headed by Prof. N. de Rooij
- Institute of Microsystem (IMS)
- at the Swiss Federal Institute of Technology (EPFL) in Lausanne, CH.
- MicMec
- at the University of Twente, NL, headed by Prof. M. Elwenspoek
Company
- IBM Patent-Server
- VDI, Germany
- ACLARA Biosciences, Inc.
- AIP (N. Tien)
- Caliper Technologies Inc.
- Cepheid (DNA analysis)
- Cronos
- VDI, Germany
- the home of the MUMPS surface micromachining process
- GEMAC - Microsystems
- HIMT | Heidelberg Instruments
- IntelliSense Corporation
- Intersema, innovative pressure sensor technology
- InterScience, Inc.
- i-STAT (biomed analysis)
- Optical Micro-Machines, Inc.
- MEMSCAP
- MEMS Optical
- Mezzosystem (LIGA, X-Ray)
- Microparts
- HIMT | Heidelberg Instruments
- LIGA products in Germany
- Moritz Design
- TRW NovaSensor - pressure
- PHS MEMS (Silmag)
- Plasma-Therm, Inc.
- SensoNor asa
- SEYONIC (microfluidic - CH)
- SILTRONIX
- TRW NovaSensor - pressure
- Silicon wafers
- SINTEF ECY Microsystems
- Standard MEMS
- Surface Technology Systems Limited (STS)
- Twente MicroProducts - Microsystems
- XactiX - XeF2 etch system
- Standard MEMS
Others
- MEMS Clearinghouse
- a good MEMS ressource with jobs, news, database, discussion lists...
- Asian Technology Information Program
- Everything about MEMS!
- MEMS -- Stroud Reference Database -- trimmer.net (TM)
- Nexus-Emsto
- Everything about MEMS!
- A good list of link to further site...
- EPFL MEMS-Links
- Semiconductor-Subway
- MEMS-Louisville Links
- University of Delft MEMS Links
- Semiconductor-Subway
