Conference | Journals | MEMS Questions

The following links are useful resources for MEMS related research

If you find a broken link please tell us!

MEMS Conferences

All over the year
SPIE conferences, all over the world : A link to the upcoming SPIE conferences on MEMS and micromachining - too many to list here!

MEMS Journals


This journal is still the best in the field, and the editorial board has opened up recently, becoming is more open to contribution from outside north-america!
Journal of Micromechanics and Microengineering
A journal of IOP, dominated by European. They offer fast review processes and electronic submission. The quality has vastly improved recently...
Sensors and Actuators A
That is the most cited journal in the field. The policy is not very strict and the editors give junior scientists their chance, even if the supervisor is not very famous in the field. The quality has high... and low - particularly again when the journal is used to publish in special issues conference papers...
Smart Materials and Structures
A IOP journal, with editor V. Varadan. If you have paper on sensor, piezoelectric actuators, piezoelectric thin-film, shape memory alloy or other smart material, submit it here.
Journal of Micromechatronics
A recent journal, first issue appears in 2000. The journal is dominated by Japanese, so papers from Asia may have good chance. The journal covers all fields of MEMS, but the editor has robotics background. If you have a paper on micro robotics, micro manipulators, this journal is a good place.
Microsystem Technologies
A German dominated journal. It favors papers on technology, especially high-aspect ratio technology (LIGA like) and a technology paper can find a place here.
Journal of Micro/Nanolithography, MEMS, and MOEMS
a recent (2002) SPIE Journal trying to take some part of the MEMS' paper cake...


Sensor Letters
A brand new (2003) journal covering all aspects of sensor science and technology in all fields of science, engineering, and medicine, with the aim to publish paper FAST... let see how it goes!
Sensors and Materials
A serious journal edited by Japanese (Editor Sugiyama from Ritsumeikan) but may not be commonly found in library outside Japan...

Micro-Fluidics and BioMEMS

Lab on a Chip (LOC)
Published by the Royal Society of Chemistry the journal has the highest impact factor in the field of microfluidic and bioMEMS (4.27 in 2004!)
Sensors and Actuators B
Mostly for Chemical Sensor papers, they open a new issue on MicroTAS, the editor is Prof. van den Berg of University Twente. You can submit your microfluidics and Bio-MEMS paper here.
Biomedical microdevices
This is a new journal dedicated to Bio-MEMS. The founding editor is Mauro Ferrari, a young guy from Berkeley. Now he is full professor at Ohio State University. If you are interested in Bio-MEMS, keep an eye on him and this journal.
Biosensors and Bioelectronics
This journal is for Bioengineering people, Bio-MEMS is welcome here.
IEEE Transaction on Biomedical engineering
Bio-MEMS for biomedical application has a good chance here. But bear in mind, the review process of IEEE Transactions is long (it can take 1-2 years...).
Microscale Thermophysical Engineering
A good journal for thermal and fluids people. The founding Editor is C. L. Tien from Berkeley (the father of N. Tien of MEMS' fame :-). All kinds of experimental and theoretical works on thermal and fluids can be submitted here.

Optical MEMS

IEEE/OSA Journal of Lightwave Technology
For really serious optical MEMS with more optics than MEMS, you will find this journal quite suitable. However the high quality has a price... publication may be damned slow.
IEEE Photonics Technology Letters
An optics related journal with a technology flavor, good for publishing short optical MEMS stuff. As it is a letter, the publication can be quick.
International Journal of Optomechatronics
A new Journal (2007) with a big part devoted to Optical MEMS.

Where to get your MEMS questions answered ?

MEMS material database
with all the properties you want on many MEMS materials - but don't forget to contribute!
SU-8 technology
everything about this ultra-thick negative photoresist
by D. Banks, a nice online introduction to the MEMS technology
In books at the NTU library
from introductory level to reference level, 'An Introduction to MEMS engineering' by N. Malouf, 'Transducers sourcebook' by G. T. Kovacs, 'Microsystem design' by S. D. Senturia, 'Microfabrication Technology' by M. Madou. The list is not exhaustive, but it should be more than enough, however, if you're new to the field, browse it step by step! When you're at the library you may look also in the Journals listed below, but do a database search first.
At the international discussion list
please use it as a last resort only and not for asking 'what are the piezoelectric coefficient in <100> silicon along the <110> axis ?'. It is not that it isn't a good question - asking questions is always appropriate... but you should find the answer by talking with others, in the Library, or by asking it to the local list first! And, no, you won't loose your face - only the guy who is doing nothing never ask questions!

This webpage has been updated on Tuesday, 29 September 2009.